商品介紹
               
 
Optical Profiler
 
 
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 Get an optical profilometer for less than half the price of an AFM or 3D stylus profilometer. The Profilm3D uses state-of-the-art white light interferometry (WLI) to measure surface profiles and roughness down to 0.05µm; adding the PSI option takes the minimum vertical feature size down to 0.001µm. Profilm software can analysis full image, including surface texture(roughness) even on curved surface and step-height. For larger image, the software also can stitch multiple images together.

 
 
 

   
 
 
    
  
  ● Feature   
  
   • Automated XY stage with 100mm x 100mm of motion and tip-tilt with +/-5°
       of range
   • Automated Z-motion with 100mm of range
   • Industry-leading 500μm of piezo travel
   • Industry-leading 2mm-wide field-of-view with 10x objective. Also it can
       configure with four-position turret for other applications that mu-ltiple
       magnification objective are used alternately
   • 265mm maximum sample width
   • Include 10um step-height standard with 0.5% accuracy. Other 100um, 2um
       and 4um are available
   • Sub-nanometer Vertical Resolution
   • Intuitive Profilm & Profilm Online Analysis Software(can be control by
       smartphone or tablet)

  

Application

-Step high-
3D step height from nanometers to millimeters(Ex: Aluminum coating (306nm) on glass slide)
-Form: 3D bow and shape-
(Ex: Compound eye of a wasp)
-Texture: 3D roughness and waviness-
(EX: Etched Si Surface)
-Optical lens-
(EX: Fresnel Lens)
-Dicing-Saw Test Cuts-
(EX: Dicing Saw Qualification)



Industries

  
   • Universities, research labs and institutes
   • Silicon and compound semiconductor
   • Precision optics and mechanics
   • Medical devices
   • LED: Light emitting diodes
   • MEMS: Micro-electromechanical systems
   • Data storage
   • Automotive
  

  

  For curved and texture (roughness) surface, the software has removal (aka form removal) and filtering functions.
  By line and area, with all 47 standard ASME/EUR/ISO roughness parameters can be supported.

———●〈Texture (Roughness) Analysis〉●———
Roughness measurement of mlrror-finlsh automotive metal using VSI mode
Roughness measurement of bare silicon wafer using PSI mode
 
  
   • The Alpha step is a destructive measurement and our system uses an optical non-contact
       method
   • Can measure samples with curvature and other uneven surfaces
   • For the same measurement time, such as a few seconds, this system can measure an area of ​​
       several square millimeters, but the Alpha step can only perform one-dimensional linear
       scanning
   • Measurable better aspect ratio
  

—●〈 Compare with Alpha Step(Dektak® & Alpha Step® stylus 〉●—

———●〈 Powerful Online Analysis Software :                                                         
         A wide variety of file formats, including AFM, are accepted〉●———
     
Measure step heights
  
Remove form (shapes) from images (Makes images flat so surface texture can be measured)
  
Filter images (Roughness and waviness / Spatial and FFT )
  
Stitch together multiple images (Requires XY position for each image)
Product Specification

Item
Specification
Performance
(1) Thickness Range,WLI:50nm~10mm
(2) Thickness Range,PSI*:0~3µm
(3) Sample Reflectance Range:0.05%~100%
Mechanical
(1) Z Range:100mm
(2) Piezo Range:500µm
(3) XY Stage Type:Automated
(4) XY Stage Range:100mmX100mm or 200mmX200mm
(5) Camera:2592X1944 (5megapixels)
Nikon CF IC Epi Plan
Magnification
Field-of-View
◆ 5X:4.0X3.4mm
◆ 10X:2.0X1.7mm
◆ 20X:1.0X0.85mm
◆ 50X:0.4X0.34mm
◆ 100X:0.2X0.17mm
Spatial Sampling
◆ 1.76µm
◆ 0.88µm
◆ 0.44µm
◆ 0.176µm
◆ 0.088µm